Amtech Systems, Inc. (ASYS)
Tempe, AZ, US
Amtech Systems, Inc. (ASYS) is a global provider specializing in the production and sale of advanced capital equipment and associated consumables. These offerings are crucial for manufacturing a diverse array of electronic components, including silicon carbide (SiC) and silicon power devices, analog and discrete devices, electronic assemblies, and light-emitting diodes (LEDs). The company's operations are structured around two primary divisions: 1. The Semiconductor Segment: This division focuses on developing, producing, marketing, and supporting thermal processing systems. Its product line includes solder reflow ovens, diffusion furnaces, and custom high-temperature belt furnaces, which are essential for semiconductor fabrication, as well as applications in electronics, automotive, and other industrial sectors. Additionally, this segment provides equipment and services for wafer polishing. 2. The Material and Substrate Segment: This segment manufactures and supplies both machinery and consumables specifically designed for the precise lapping and polishing of various materials. These materials encompass silicon wafers for semiconductor products; sapphire substrates utilized in LED lighting and mobile technology; silicon carbide wafers for LED and power device applications; different glass and silica components for 3D image transmission; quartz and ceramic components for telecommunications devices; and specialized parts for medical devices, optical, and photonics applications. This division also produces substrate process chemicals vital for diverse manufacturing processes, including those for semiconductors, silicon and compound semiconductor wafers, and optics. Amtech Systems distributes its products globally through a combination of its own direct sales force and an extensive network of independent sales representatives and distributors. Founded in 1981 and headquartered in Tempe, Arizona, the company initially operated as Quartz Engineering & Materials, Inc. before officially adopting the name Amtech Systems, Inc. in 1987.
4 articles
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| Target company | Ticker | Date | Filing |
|---|---|---|---|
| BTUI | BTUI | 2014-11-24 | View |
| Indicator | 1D | 1W | 2W | 3W | 1M |
|---|
Day Score & sub-scores
Statistical fingerprint & regime detail
Conditional historical analysis
Customize analysis (advanced)
| 1D | 5D | 1M | 3M | 6M | YTD | 1Y | 3Y | 5Y | 10Y | Max |
|---|---|---|---|---|---|---|---|---|---|---|
| +5.54% | +24.27% | +53.76% | +106.37% | +198.81% | +80.72% | +575.00% | +159.20% | +147.06% | +300.00% | +126.80% |
Revenue flow
Revenue by geography
Revenue by segment
Revenue composition
By product
By geography
Income Statement
Balance Sheet
Cash Flow Statement
Key Metrics
Financial Ratios
Employees
Financial Growth (CAGR)
Market Data
| Rating | 2026-05 | Change |
|---|---|---|
| Strong Buy | 0 | 0 |
| Buy | 1 | 0 |
| Hold | 0 | 0 |
| Sell | 0 | 0 |
| Strong Sell | 0 | 0 |
| Period | # Analysts | Avg Target |
|---|---|---|
| Last Month | 1 |
22.00
+19.4%
|
| Last Quarter | 1 |
22.00
+19.4%
|
| Last Year | 1 |
22.00
+19.4%
|
| All Time | 1 |
22.00
+19.4%
|
-
Revenue growth Semiconductors: +12.5%-21.6% Q1'26: +31.4% (vs Q1'25)
-
EPS growth Semiconductors: +22.5%-253.3% Q1'26: +103.5% (vs Q1'25)
-
FCF margin FCF growth · Semiconductors: +38.2%-29.3% Q1'26: +9.3% (vs Q1'25)
-
EBIT margin Semiconductors: +10.7%-35.2% Q1'26: +8.8% (vs Q1'25)
-
ROIC Semiconductors: +6.0%-50.9% Q1'26: +10.0% (vs Q1'25)
-
Share dilution Semiconductors: +0.0%+0.7% Q1'26: +3.7% (vs Q1'25)
-
Debt / EBITDA Net debt/EBITDA · Semiconductors: -0.75×-0.77× Q1'26: 1.94× (vs Q1'25)
* These projections are based on analyst consensus estimates and user-defined valuation multiples. This table is for informational purposes only and does not constitute a recommendation to buy or sell any security. Past performance is not indicative of future results.
| Metric |
Sep 2010 actual |
Sep 2011 actual |
Sep 2014 actual |
Sep 2015 actual |
Sep 2016 actual |
Sep 2017 actual |
Sep 2018 actual |
Sep 2019 actual |
Sep 2020 actual |
Sep 2021 actual |
Sep 2022 actual |
Sep 2023 actual |
Sep 2024 actual |
Sep 2025 actual |
Sep 2026 1 Rev. Ana. 1 EPS Ana. |
Sep 2027 1 Rev. Ana. 1 EPS Ana. |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Revenue |
120.02M
est: 124.11M (-3.3%)
|
246.71M
est: 215.38M (+14.5%)
|
56.50M
est: 41.46M (+36.3%)
|
104.88M
est: 103.82M (+1.0%)
|
120.31M
est: 114.25M (+5.3%)
|
83.07M
est: 156.74M (-47.0%)
|
100.05M
est: 174.77M (-42.8%)
|
85.04M
est: 88.26M (-3.7%)
|
65.46M
est: 64.61M (+1.3%)
|
85.21M
est: 86.91M (-2.0%)
|
106.30M
est: 105.89M (+0.4%)
|
113.32M
est: 108.80M (+4.1%)
|
101.21M
est: 100.85M (+0.4%)
|
79.36M
est: 77.91M (+1.9%)
|
83.40M
83.40M – 83.40M
+7.0% YoY
|
95.00M
95.00M – 95.00M
+13.9% YoY
|
| EBITDA |
18.28M
est: 17.32M (+5.6%)
|
43.95M
est: 22.44M (+95.8%)
|
-10.68M
est: -9.89M (-8.0%)
|
-9.58M
est: 1.97M (-585.3%)
|
-4.93M
est: 4.35M (-213.4%)
|
6.13M
est: 60.30M (-89.8%)
|
10.17M
est: 21.68M (-53.1%)
|
7.72M
est: -623.3K (+1,337.9%)
|
990.0K
est: -15.35M (+106.4%)
|
5.07M
est: 9.05M (-44.0%)
|
20.68M
est: 12.51M (+65.3%)
|
-9.65M
est: -4.08M (-136.2%)
|
-3.93M
est: -3.79M (-3.7%)
|
-25.22M
est: -2.93M (-762.3%)
|
-3.13M
-3.13M – -3.13M
-7.0% YoY
|
-3.57M
-3.57M – -3.57M
-13.9% YoY
|
| EBIT |
16.52M
est: 15.61M (+5.9%)
|
41.13M
est: 18.32M (+124.5%)
|
-13.09M
est: -12.13M (-7.9%)
|
-12.94M
est: -19.66M (+34.2%)
|
-7.91M
est: -6.55M (-20.8%)
|
3.64M
est: 52.89M (-93.1%)
|
8.32M
est: -659.6K (+1,361.1%)
|
6.03M
est: 8.96M (-32.7%)
|
-268.0K
est: -97.9K (-173.6%)
|
3.67M
est: 6.65M (-44.8%)
|
18.95M
est: 10.26M (+84.8%)
|
-14.66M
est: -7.16M (-104.7%)
|
-6.95M
est: -6.64M (-4.8%)
|
-27.97M
est: -5.13M (-445.3%)
|
-5.49M
-5.49M – -5.49M
-7.0% YoY
|
-6.25M
-6.25M – -6.25M
-13.9% YoY
|
| Net Income |
9.56M
est: 9.27M (+3.1%)
|
22.88M
est: 11.30M (+102.5%)
|
-13.05M
est: -12.62M (-3.4%)
|
-7.77M
est: -6.37M (-21.9%)
|
-7.01M
est: -4.70M (-49.2%)
|
9.13M
est: 45.73M (-80.0%)
|
5.31M
est: 16.32M (-67.5%)
|
-5.16M
est: -7.07M (+27.0%)
|
-15.72M
est: -18.95M (+17.0%)
|
1.51M
est: 2.30M (-34.5%)
|
17.37M
est: 5.51M (+215.3%)
|
-12.58M
est: -21.66M (+41.9%)
|
-8.49M
est: -8.15M (-4.1%)
|
-30.33M
est: -31.89M (+4.9%)
|
4.58M
4.58M – 4.58M
+114.3% YoY
|
11.44M
11.44M – 11.44M
+150.0% YoY
|
| SGA |
24.08M
est: 25.97M (-7.3%)
|
43.74M
est: 32.00M (+36.7%)
|
18.42M
est: 14.25M (+29.3%)
|
33.03M
est: 47.90M (-31.0%)
|
33.97M
est: 52.94M (-35.8%)
|
24.73M
est: 104.40M (-76.3%)
|
25.74M
est: 93.50M (-72.5%)
|
24.26M
est: 37.34M (-35.0%)
|
21.40M
est: 33.92M (-36.9%)
|
24.74M
est: 50.12M (-50.6%)
|
28.30M
est: 51.92M (-45.5%)
|
42.00M
est: 35.38M (+18.7%)
|
33.81M
est: 32.80M (+3.1%)
|
28.95M
est: 25.34M (+14.3%)
|
27.12M
27.12M – 27.12M
+7.0% YoY
|
30.90M
30.90M – 30.90M
+13.9% YoY
|
| EPS |
1.06
est: 0.53 (+100.0%)
|
2.41
est: 0.74 (+225.7%)
|
-1.34
est: -0.70 (-92.8%)
|
-0.65
est: -1.14 (+43.0%)
|
-0.53
est: -0.59 (+9.4%)
|
0.68
est: 0.23 (+191.4%)
|
0.36
est: 0.78 (-53.8%)
|
0.22
est: -0.30 (+174.2%)
|
-0.28
est: -0.70 (+59.8%)
|
0.11
est: 0.16 (-29.8%)
|
1.24
est: 1.04 (+19.2%)
|
-0.89
est: -1.51 (+41.2%)
|
-0.60
est: -0.57 (-5.3%)
|
-2.12
est: -2.23 (+4.9%)
|
0.32
0.32 – 0.32
+114.3% YoY
|
0.80
0.80 – 0.80
+150.0% YoY
|
| Date | Rating | Overall | DCF | ROE | ROA | D/E | P/E | P/B |
|---|---|---|---|---|---|---|---|---|
| 2026-05-07 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-05-06 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-05-05 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-05-04 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-05-01 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-04-30 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-04-29 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-04-28 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-04-27 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-04-24 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-04-23 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-04-22 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-04-21 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-04-20 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-04-17 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
| 2026-04-16 | C- | 1/5 | 1/5 | 1/5 | 1/5 | 2/5 | 1/5 | 3/5 |
Owner Earnings
Ownership Overview
| # | Reporting person | Amount owned | % of class | Sole voting | Shared voting | Sole dispositive | Shared dispositive | Type | Citizenship | Filing date | SEC filing |
|---|---|---|---|---|---|---|---|---|---|---|---|
| 1 | Robert Averick | 2.40M | 18.20% | — | 2.40M | — | — | IN | United States of America | 2016-01-25 | ↗ |
| 2 | 52-6435625 | 1.39M | 10.50% | 1.39M | — | 1.39M | — | OO | Connecticut | 2016-01-25 | ↗ |
| 3 | (. | 1.26M | 8.87% | 1.19M | — | 1.26M | — | IA | Delaware Limited Partnership | 2019-02-08 | ↗ |
| 4 | 30-0447847 | 1.10M | 7.70% | 1.08M | — | 1.10M | — | IA | — | 2022-02-08 | ↗ |
| 5 | Wax Asset Management, LLC | 961.2K | 6.80% | 961.2K | — | 961.2K | — | IA | United States | 2024-02-09 | ↗ |
| 6 | Pacific Ridge Capital Partners, LLC | 890.7K | 6.22% | 803.1K | — | 890.7K | — | IA | Each Reporting Person | 2022-02-14 | ↗ |
| 7 | First Eagle Investment Management, LLC | 783.4K | 5.51% | — | — | — | — | IA | — | 2024-11-12 | ↗ |
| 8 | 47-3106673 | 600.0K | 4.60% | 600.0K | — | 600.0K | — | OO | Delaware | 2016-01-25 | ↗ |
| 9 | The Vanguard Group - 23-1945930 | 473.9K | 3.31% | — | 2.6K | 467.1K | 6.8K | IA | Pennsylvania | 2022-02-09 | ↗ |
| 10 | 20-6116984 | 263.7K | 2.00% | 263.7K | — | 263.7K | — | OO | Delaware | 2016-01-25 | ↗ |
| 11 | 26-4810266 | 22.9K | 0.20% | 22.9K | — | 22.9K | — | OO | Connecticut | 2016-01-25 | ↗ |
Institutional Activity (13F)
| # | Investor | Shares / Δ | Mkt value / Δ | Own% / Δ | Weight% / Δ | Avg px / Perf. | Hold / Status |
|---|---|---|---|---|---|---|---|
| 1 | FIRST EAGLE INVESTMENT MANAGEMENT, LLC | 734.3K -18.0K (-2.4%) | 9.22M +2.2M (+32.3%) | 5.13% -0.130 pp | 0.02% +0.004 pp | USD7.42 +69.1% | 19 qtrs — |
| 2 | DIMENSIONAL FUND ADVISORS LP | 672.1K -177.7K (-20.9%) | 8.44M +565.9K (+7.2%) | 4.68% -1.257 pp | 0.00% +0.000 pp | USD7.68 +63.4% | 51 qtrs — |
| 3 | VANGUARD GROUP INC | 631.9K -44.1K (-6.5%) | 7.93M +1.7M (+26.7%) | 4.40% -0.323 pp | 0.00% +0.000 pp | USD7.63 +64.5% | 72 qtrs — |
| 4 | PACIFIC RIDGE CAPITAL PARTNERS, LLC | 627.8K -18.7K (-2.9%) | 7.88M +1.9M (+31.6%) | 4.38% -0.134 pp | 1.73% +0.414 pp | USD7.28 +72.4% | 49 qtrs — |
| 5 | MARSHALL WACE, LLP | 352.6K +247.4K (+235.0%) | 4.43M +3.5M (+354.0%) | 2.46% +1.720 pp | 0.00% +0.003 pp | USD11.57 +8.5% | 2 qtrs — |
| 6 | ARROWSTREET CAPITAL, LIMITED PARTNERSHIP | 347.0K +164.6K (+90.2%) | 4.36M +2.7M (+157.8%) | 2.42% +1.142 pp | 0.00% +0.002 pp | USD10.82 +16.0% | 2 qtrs — |
| 7 | JANE STREET GROUP, LLC | 325.8K +150.3K (+85.7%) | 4.09M +2.5M (+151.7%) | 2.27% +1.043 pp | 0.00% +0.000 pp | USD10.78 +16.4% | 2 qtrs — |
| 8 | ACADIAN ASSET MANAGEMENT LLC | 236.0K +152.5K (+182.5%) | 2.96M +2.2M (+283.7%) | 1.64% +1.060 pp | 0.00% +0.004 pp | USD10.77 +16.5% | 23 qtrs — |
| 9 | RENAISSANCE TECHNOLOGIES LLC | 146.6K +126.3K (+622.1%) | 1.84M +1.7M (+878.7%) | 1.02% +0.879 pp | 0.00% +0.003 pp | USD11.70 +7.3% | 5 qtrs — |
| 10 | BLACKROCK, INC. | 134.5K +1.6K (+1.2%) | 1.69M +457.3K (+37.2%) | 0.94% +0.008 pp | 0.00% +0.000 pp | USD6.05 +107.4% | 6 qtrs — |
| 11 | GEODE CAPITAL MANAGEMENT, LLC | 133.0K +1.7K (+1.3%) | 1.67M +453.7K (+37.3%) | 0.93% +0.009 pp | 0.00% +0.000 pp | USD9.29 +35.1% | 64 qtrs — |
| 12 | CITADEL ADVISORS LLC | 124.8K +46.4K (+59.1%) | 1.57M +840.3K (+115.7%) | 0.87% +0.321 pp | 0.00% +0.000 pp | USD9.31 +34.8% | 14 qtrs — |
| 13 | TWO SIGMA INVESTMENTS, LP | 111.4K +111.4K (+100.0%) | 1.40M +1.4M (+100.0%) | 0.78% +0.776 pp | 0.00% +0.002 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 14 | BRIDGEWAY CAPITAL MANAGEMENT, LLC | 96.3K +31.5K (+48.6%) | 1.21M +608.7K (+101.4%) | 0.67% +0.218 pp | 0.03% +0.013 pp | USD9.41 +33.4% | 73 qtrs — |
| 15 | TREXQUANT INVESTMENT LP | 89.4K +89.4K (+100.0%) | 1.12M +1.1M (+100.0%) | 0.62% +0.622 pp | 0.01% +0.010 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 16 | GOLDMAN SACHS GROUP INC | 78.7K +47.4K (+151.8%) | 987.6K +698.2K (+241.3%) | 0.55% +0.330 pp | 0.00% +0.000 pp | USD10.19 +23.2% | 5 qtrs — |
| 17 | EAM INVESTORS, LLC | 74.3K +74.3K (+100.0%) | 932.5K +932.5K (+100.0%) | 0.52% +0.517 pp | 0.10% +0.104 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 18 | TWO SIGMA ADVISERS, LP | 70.0K +70.0K (+100.0%) | 878.5K +878.5K (+100.0%) | 0.49% +0.487 pp | 0.00% +0.002 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 19 | XTX TOPCO LTD | 69.4K +59.0K (+568.1%) | 870.7K +774.6K (+805.5%) | 0.48% +0.411 pp | 0.02% +0.018 pp | USD11.34 +10.7% | 3 qtrs — |
| 20 | POINT72 ASSET MANAGEMENT, L.P. | 68.2K +68.2K (+100.0%) | 855.3K +855.3K (+100.0%) | 0.47% +0.475 pp | 0.00% +0.001 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 21 | CONNOR, CLARK & LUNN INVESTMENT MANAGEMENT LTD. | 66.9K +66.9K (+100.0%) | 839.3K +839.3K (+100.0%) | 0.47% +0.466 pp | 0.00% +0.002 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 22 | STATE STREET CORP | 62.8K +8.0K (+14.6%) | 788.0K +280.7K (+55.3%) | 0.44% +0.054 pp | 0.00% +0.000 pp | USD9.33 +34.5% | 19 qtrs — |
| 23 | O'SHAUGHNESSY ASSET MANAGEMENT, LLC | 61.0K +61.0K (+100.0%) | 765.1K +765.1K (+100.0%) | 0.42% +0.425 pp | 0.00% +0.004 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 24 | SEI INVESTMENTS CO | 45.2K +45.2K (+100.0%) | 567.7K +567.7K (+100.0%) | 0.31% +0.315 pp | 0.00% +0.001 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 25 | QUBE RESEARCH & TECHNOLOGIES LTD | 42.0K +42.0K (+100.0%) | 526.8K +526.8K (+100.0%) | 0.29% +0.292 pp | 0.00% +0.001 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 26 | RITHOLTZ WEALTH MANAGEMENT | 39.6K +39.6K (+100.0%) | 496.6K +496.6K (+100.0%) | 0.28% +0.276 pp | 0.01% +0.009 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 27 | NORTHERN TRUST CORP | 39.2K +2.5K (+6.7%) | 491.7K +151.8K (+44.7%) | 0.27% +0.016 pp | 0.00% +0.000 pp | USD6.52 +92.5% | 51 qtrs — |
| 28 | ESSEX INVESTMENT MANAGEMENT CO LLC | 37.8K +— (+0.0%) | 474.6K +124.4K (+35.5%) | 0.26% -0.001 pp | 0.07% +0.019 pp | USD9.26 +35.5% | 2 qtrs — |
| 29 | MERIT FINANCIAL GROUP, LLC | 37.0K +37.0K (+100.0%) | 464.4K +464.4K (+100.0%) | 0.26% +0.258 pp | 0.00% +0.004 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 30 | GSA CAPITAL PARTNERS LLP | 30.7K -3.1K (-9.1%) | 386.0K +73.0K (+23.3%) | 0.21% -0.022 pp | 0.03% +0.007 pp | USD4.55 +175.8% | 4 qtrs — |
| 31 | JANNEY MONTGOMERY SCOTT LLC | 30.8K +4.1K (+15.2%) | 386.0K +139.0K (+56.3%) | 0.21% +0.028 pp | 0.00% +0.000 pp | USD6.69 +87.6% | 14 qtrs — |
| 32 | QUADRATURE CAPITAL LTD | 30.5K +30.5K (+100.0%) | 383.3K +383.3K (+100.0%) | 0.21% +0.213 pp | 0.00% +0.004 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 33 | JUMP FINANCIAL, LLC | 30.3K +30.3K (+100.0%) | 380.3K +380.3K (+100.0%) | 0.21% +0.211 pp | 0.00% +0.005 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 34 | EMPOWERED FUNDS, LLC | 29.5K +29.5K (+100.0%) | 370.5K +370.5K (+100.0%) | 0.21% +0.206 pp | 0.00% +0.003 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 35 | SUSQUEHANNA INTERNATIONAL GROUP, LLP | 27.9K +27.9K (+100.0%) | 350.1K +350.1K (+100.0%) | 0.19% +0.194 pp | 0.00% +0.000 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 36 | IRONWOOD INVESTMENT MANAGEMENT LLC | 27.5K -54.0 (-0.2%) | 345.6K +90.1K (+35.3%) | 0.19% -0.001 pp | 0.15% +0.034 pp | USD9.65 +30.1% | 44 qtrs — |
| 37 | BNP PARIBAS ARBITRAGE, SNC | 26.6K +26.6K (+100.0%) | 333.4K +333.4K (+100.0%) | 0.19% +0.185 pp | 0.00% +0.000 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 38 | MILLENNIUM MANAGEMENT LLC | 22.7K +10.8K (+90.4%) | 285.5K +174.9K (+158.1%) | 0.16% +0.075 pp | 0.00% +0.000 pp | USD10.82 +16.0% | 2 qtrs — |
| 39 | KOVACK ADVISORS, INC. | 22.0K -10.2K (-31.6%) | 276.1K -21.6K (-7.3%) | 0.15% -0.071 pp | 0.01% -0.015 pp | USD5.71 +119.8% | 10 qtrs — |
| 40 | CENTIVA CAPITAL, LP | 21.8K +21.8K (+100.0%) | 273.8K +273.8K (+100.0%) | 0.15% +0.152 pp | 0.00% +0.002 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 41 | HUDSON BAY CAPITAL MANAGEMENT LP | 21.6K +21.6K (+100.0%) | 270.5K +270.5K (+100.0%) | 0.15% +0.150 pp | 0.00% +0.001 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 42 | OCCUDO QUANTITATIVE STRATEGIES LP | 21.3K +21.3K (+100.0%) | 267.2K +267.2K (+100.0%) | 0.15% +0.148 pp | 0.02% +0.018 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 43 | AMERICAN CENTURY COMPANIES INC | 20.7K +10.0K (+94.5%) | 259.4K +161.0K (+163.7%) | 0.14% +0.070 pp | 0.00% +0.000 pp | USD10.86 +15.6% | 2 qtrs — |
| 44 | VILLERE ST DENIS J & CO LLC | 20.0K +— (+0.0%) | 251.0K +65.8K (+35.5%) | 0.14% 0.000 pp | 0.03% +0.007 pp | USD5.43 +131.1% | 8 qtrs — |
| 45 | SQUAREPOINT OPS LLC | 16.7K +16.7K (+100.0%) | 209.3K +209.3K (+100.0%) | 0.12% +0.116 pp | 0.00% +0.000 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 46 | OMERS ADMINISTRATION CORP | 16.6K +16.6K (+100.0%) | 208.3K +208.3K (+100.0%) | 0.12% +0.116 pp | 0.00% +0.002 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 47 | ANCORA ADVISORS, LLC | 16.2K -19.0K (-53.9%) | 203.9K -122.5K (-37.5%) | 0.11% -0.133 pp | 0.00% -0.002 pp | USD5.35 +134.6% | 43 qtrs — |
| 48 | SOWELL FINANCIAL SERVICES LLC | 16.2K +16.2K (+100.0%) | 202.8K +202.8K (+100.0%) | 0.11% +0.113 pp | 0.01% +0.007 pp | USD12.55 +0.0% | 4 qtrs — |
| 49 | JAMES INVESTMENT RESEARCH INC | 14.6K +— (+0.0%) | 183.2K +48.0K (+35.5%) | 0.10% 0.000 pp | 0.02% +0.005 pp | USD9.26 +35.5% | 2 qtrs — |
| 50 | NEWEDGE ADVISORS, LLC | 14.6K +— (+0.0%) | 183.2K +48.0K (+35.5%) | 0.10% 0.000 pp | 0.00% +0.000 pp | USD9.26 +35.5% | 2 qtrs — |
| 51 | MORGAN STANLEY | 13.2K +5.5K (+70.7%) | 165.8K +94.1K (+131.4%) | 0.09% +0.038 pp | 0.00% +0.000 pp | USD9.67 +29.8% | 50 qtrs — |
| 52 | BARCLAYS PLC | 12.7K +12.7K (+42,226.7%) | 159.4K +159.1K (+57,223.7%) | 0.09% +0.088 pp | 0.00% +0.000 pp | USD12.54 +0.1% | 2 qtrs — |
| 53 | GRAHAM CAPITAL MANAGEMENT, L.P. | 12.6K +12.6K (+100.0%) | 158.2K +158.2K (+100.0%) | 0.09% +0.088 pp | 0.00% +0.004 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 54 | LPL FINANCIAL LLC | 12.0K -822.0 (-6.4%) | 150.5K +31.8K (+26.8%) | 0.08% -0.006 pp | 0.00% +0.000 pp | USD9.26 +35.5% | 2 qtrs — |
| 55 | WEALTHTRUST AXIOM LLC | 11.3K -24.5K (-68.4%) | 141.8K -189.7K (-57.2%) | 0.08% -0.171 pp | 0.04% -0.052 pp | USD7.60 +65.1% | 46 qtrs — |
| 56 | UBS GROUP AG | 9.8K +7.8K (+383.3%) | 123.1K +104.3K (+554.9%) | 0.07% +0.054 pp | 0.00% +0.000 pp | USD10.89 +15.2% | 45 qtrs — |
| 57 | GROUP ONE TRADING, L.P. | 7.5K +5.5K (+273.0%) | 94.7K +76.0K (+405.5%) | 0.05% +0.038 pp | 0.00% +0.000 pp | USD11.67 +7.5% | 2 qtrs — |
| 58 | KESTRA ADVISORY SERVICES, LLC | 7.1K +7.1K (+100.0%) | 88.5K +88.5K (+100.0%) | 0.05% +0.049 pp | 0.00% +0.000 pp | USD12.55 +0.0% | 1 qtrs NEW |
| 59 | CITIGROUP INC | 2.4K +2.4K (+238,700.0%) | 30.0K +30.0K (+332,888.9%) | 0.02% +0.017 pp | 0.00% +0.000 pp | USD12.55 +0.0% | 2 qtrs — |
| 60 | SIMPLEX TRADING, LLC | 681.00 +681.0 (+100.0%) | 8.5K +8.5K (+100.0%) | 0.00% +0.005 pp | 0.00% +0.000 pp | USD12.55 +0.0% | 5 qtrs — |
| 61 | ADVISOR GROUP HOLDINGS, INC. | 645.00 -135.0 (-17.3%) | 8.1K +1.3K (+18.8%) | 0.00% -0.001 pp | 0.00% +0.000 pp | USD5.74 +118.6% | 17 qtrs — |
| 62 | STRENGTHENING FAMILIES & COMMUNITIES, LLC | 490.00 +— (+0.0%) | 6.2K +1.6K (+35.6%) | 0.00% +0.000 pp | 0.00% +0.001 pp | USD9.26 +35.5% | 2 qtrs — |
| 63 | FMR LLC | 428.00 -237.0 (-35.6%) | 5.4K -787.0 (-12.8%) | 0.00% -0.002 pp | 0.00% +0.000 pp | USD4.44 +182.7% | 3 qtrs — |
| 64 | SBI SECURITIES CO., LTD. | 130.00 -21.0 (-13.9%) | 1.6K +234.0 (+16.7%) | 0.00% 0.000 pp | 0.00% +0.000 pp | USD5.34 +135.0% | 5 qtrs — |
| 65 | ROYAL BANK OF CANADA | 46.00 +46.0 (+100.0%) | 1.0K +1.0K (+100.0%) | 0.00% +0.000 pp | 0.00% +0.000 pp | USD12.54 +0.1% | 5 qtrs — |
| 66 | BANK OF AMERICA CORP /DE/ | 78.00 -1.6K (-95.4%) | 979.00 -14.6K (-93.7%) | 0.00% -0.011 pp | 0.00% +0.000 pp | USD8.78 +42.9% | 9 qtrs — |
| 67 | HRT FINANCIAL LP | — -16.5K (-100.0%) | — -152.0K (-100.0%) | 0.00% -0.115 pp | 0.00% -0.001 pp | USD— | 2 qtrs SOLD |
| 68 | BREVAN HOWARD CAPITAL MANAGEMENT LP | — -18.0K (-100.0%) | — -166.7K (-100.0%) | 0.00% -0.126 pp | 0.00% -0.001 pp | USD— | 2 qtrs SOLD |
| 69 | ENGINEERS GATE MANAGER LP | — -13.4K (-100.0%) | — -124.5K (-100.0%) | 0.00% -0.094 pp | 0.00% -0.001 pp | USD— | 2 qtrs SOLD |
| 70 | WELLS FARGO & COMPANY/MN | — -2.6K (-100.0%) | — -23.7K (-100.0%) | 0.00% -0.018 pp | 0.00% +0.000 pp | USD— | 2 qtrs SOLD |
| 71 | WEXFORD CAPITAL LP | — -18.8K (-100.0%) | — -174.2K (-100.0%) | 0.00% -0.131 pp | 0.00% -0.025 pp | USD— | 2 qtrs SOLD |
| 72 | WILLIAMS & NOVAK, LLC | — -10.3K (-100.0%) | — -94.9K (-100.0%) | 0.00% -0.072 pp | 0.00% -0.073 pp | USD— | 4 qtrs SOLD |
| 73 | EHP FUNDS INC. | — -25.2K (-100.0%) | — -233.7K (-100.0%) | 0.00% -0.176 pp | 0.00% -0.206 pp | USD— | 2 qtrs SOLD |
| 74 | PRINCIPAL SECURITIES, INC. | — -200.0 (-100.0%) | — -1.9K (-100.0%) | 0.00% -0.001 pp | 0.00% +0.000 pp | USD— | 9 qtrs SOLD |
| 75 | SIGNATUREFD, LLC | — -400.0 (-100.0%) | — -3.7K (-100.0%) | 0.00% -0.003 pp | 0.00% 0.000 pp | USD— | 2 qtrs SOLD |
| 76 | THOMPSON DAVIS & CO., INC. | — -13.3K (-100.0%) | — -122.7K (-100.0%) | 0.00% -0.093 pp | 0.00% -0.076 pp | USD— | 2 qtrs SOLD |
| 77 | GWN SECURITIES INC. | — -20.4K (-100.0%) | — -189.1K (-100.0%) | 0.00% -0.143 pp | 0.00% -0.044 pp | USD— | 2 qtrs SOLD |
ETF Ownership
| # | ETF | Weight | Est. AUM exposure | TER |
|---|---|---|---|---|
| 1 | Even Herd Long Short ETF EHLS | 0.26% | 159.6K | 2.62% |
| 2 | iShares Micro-Cap ETF IWC | 0.05% | 732.3K | 0.60% |
| 3 | Goldman Sachs ActiveBeta U.S. Small Cap Equity ETF GSSC | 0.03% | 358.6K | 0.20% |
| 4 | EA Bridgeway Omni Small-Cap Value ETF BSVO | 0.03% | 473.5K | 0.47% |
| 5 | Invesco Russell 2000 Dynamic Multifactor ETF OMFS | 0.02% | 54.1K | 0.39% |
| 6 | Avantis U.S. Small Cap Equity ETF AVSC | 0.01% | 425.3K | 0.25% |
| 7 | iShares Russell 2000 Growth ETF IWO | 0.01% | 2.06M | 0.24% |
| 8 | U.S. Micro Cap Portfolio ETF DFMC | 0.01% | 888.2K | 0.43% |
| 9 | State Street SPDR Russell 2000 U.S. Small Cap UCITS ETF (Acc) R2US.L | 0.01% | 474.1K | 0.30% |
| 10 | Xtrackers Russell 2000 UCITS ETF 1C XRSU.L | 0.01% | 218.9K | 0.30% |
Insider Activity
| Date | Person | Role | Transaction | A/D | Security | Shares | Price | Value | Owned after | D/I | Filing |
|---|---|---|---|---|---|---|---|---|---|---|---|
| 2026-03-05 | LUDWIG MICHAEL M | Director | M-Exempt | A | Amtech Systems, Inc. $0.01 par value common stock | 8,081 | 0.00 | — | 33,069 | D | ↗ |
| 2026-03-05 | Jakwani Asif Y. | Director | M-Exempt | A | Amtech Systems, Inc. $0.01 par value common stock | 8,081 | 0.00 | — | 8,081 | D | ↗ |
| 2026-03-05 | GARNREITER MICHAEL | Director | M-Exempt | A | Amtech Systems, Inc. $0.01 par value common stock | 8,081 | 0.00 | — | 38,569 | D | ↗ |
| 2026-03-05 | Averick Robert M | Director / 10% Owner | M-Exempt | A | Common Stock | 8,081 | 0.00 | — | 707,341 | D | ↗ |
| 2026-03-04 | LUDWIG MICHAEL M | Director | A-Award | A | Restricted Stock Units | 2,839 | 0.00 | — | 2,839 | D | ↗ |
| 2026-03-04 | Jakwani Asif Y. | Director | A-Award | A | Restricted Stock Units | 2,839 | 0.00 | — | 2,839 | D | ↗ |
| 2026-03-04 | GARNREITER MICHAEL | Director | A-Award | A | Restricted Stock Units | 2,839 | 0.00 | — | 2,839 | D | ↗ |
| 2026-03-04 | Averick Robert M | Director / 10% Owner | A-Award | A | Restricted Stock Units | 2,839 | 0.00 | — | 10,920 | D | ↗ |
| 2025-09-02 | Averick Robert M | Director / 10% Owner | M-Exempt | D | Director Stock Option (Right to Buy) | 6,000 | 5.40 | 32.4K | 36,000 | D | ↗ |
| 2025-08-08 | DAIGLE ROBERT C | Director / Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 100,000 | 5.09 | 509.0K | 100,000 | D | ↗ |
| 2025-05-16 | DAIGLE ROBERT C | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 355 | 3.48 | 1.2K | 156,890 | D | ↗ |
| 2025-05-16 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 21,377 | 3.54 | 75.7K | 675,260 | D | ↗ |
| 2025-05-15 | DAIGLE ROBERT C | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stotock | 2,498 | 3.49 | 8.7K | 156,535 | D | ↗ |
| 2025-05-14 | DAIGLE ROBERT C | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 5,000 | 3.48 | 17.4K | 154,037 | D | ↗ |
| 2025-05-14 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 46,272 | 3.46 | 160.1K | 653,883 | D | ↗ |
| 2025-03-19 | Jenke Wade Michael | Officer | A-Award | A | Restriced Stock Units | 25,000 | 0.00 | — | 25,000 | D | ↗ |
| 2025-03-10 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 10,000 | 4.86 | 48.6K | 607,611 | D | ↗ |
| 2025-03-06 | LUDWIG MICHAEL M | Director | M-Exempt | A | Amtech Systems, Inc. $0.01 par value common stock | 8,299 | 0.00 | — | 24,988 | D | ↗ |
| 2025-03-06 | GARNREITER MICHAEL | Director | M-Exempt | A | Amtech Systems, Inc. $0.01 par value common stock | 8,299 | 0.00 | — | 30,488 | D | ↗ |
| 2025-03-06 | Averick Robert M | Director / 10% Owner | M-Exempt | A | Common Stock | 8,299 | 0.00 | — | 597,611 | D | ↗ |
| 2025-03-05 | LUDWIG MICHAEL M | Director | A-Award | A | Restricted Stock Units | 8,081 | 0.00 | — | 16,380 | D | ↗ |
| 2025-03-05 | Jakwani Asif Y. | Director | A-Award | A | Restricted Stock Units | 8,081 | 0.00 | — | 8,081 | D | ↗ |
| 2025-03-05 | GARNREITER MICHAEL | Director | A-Award | A | Restricted Stock Units | 8,081 | 0.00 | — | 16,380 | D | ↗ |
| 2025-03-05 | Averick Robert M | Director / 10% Owner | A-Award | A | Restricted Stock Units | 8,081 | 0.00 | — | 16,380 | D | ↗ |
| 2025-03-03 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 5,000 | 4.89 | 24.5K | 587,789 | D | ↗ |
| 2025-02-13 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 22,000 | 4.85 | 106.7K | 582,789 | D | ↗ |
| 2025-02-07 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 54,789 | 5.02 | 275.0K | 560,789 | D | ↗ |
| 2025-02-03 | Jakwani Asif Y. | — | — | — | — | 0 | 0.00 | — | 0 | — | ↗ |
| 2024-12-13 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 7,500 | 5.63 | 42.2K | 506,000 | D | ↗ |
| 2024-12-12 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 19,500 | 5.70 | 111.2K | 498,500 | D | ↗ |
| 2024-12-11 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 5,000 | 5.65 | 28.3K | 479,000 | D | ↗ |
| 2024-08-14 | DAIGLE ROBERT C | Director / Officer | M-Exempt | A | Amtech Systems, Inc. $0.01 par value common stock | 55,556 | 0.00 | — | 164,509 | — | ↗ |
| 2024-08-13 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 10,000 | 5.51 | 55.1K | 474,000 | — | ↗ |
| 2024-08-12 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 5,000 | 5.54 | 27.7K | 464,000 | — | ↗ |
| 2024-08-09 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 25,000 | 5.53 | 138.3K | 459,000 | — | ↗ |
| 2024-08-08 | Jenke Wade Michael | Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 30,000 | 5.37 | 161.1K | 30,000 | — | ↗ |
| 2024-05-14 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 2,784 | 5.45 | 15.2K | 434,000 | — | ↗ |
| 2024-05-13 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 304 | 5.16 | 1.6K | 431,216 | — | ↗ |
| 2024-05-10 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 12,723 | 5.20 | 66.2K | 430,912 | — | ↗ |
| 2024-03-15 | GIBBS LISA | Director / Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 30,000 | 4.73 | 141.9K | 30,000 | — | ↗ |
| 2024-03-11 | LUDWIG MICHAEL M | Director | A-Award | A | Amtech Systems, Inc. $0.01 par value common stock | 2,000 | 4.73 | 9.5K | 16,689 | — | ↗ |
| 2024-03-07 | LUDWIG MICHAEL M | Director | A-Award | A | Amtech Systems, Inc. $0.01 par value common stock | 1,500 | 4.91 | 7.4K | 14,689 | — | ↗ |
| 2024-03-06 | LUDWIG MICHAEL M | Director | A-Award | A | Amtech Systems, Inc. $0.01 par value common stock | 6,000 | 4.85 | 29.1K | 13,189 | — | ↗ |
| 2024-03-06 | GARNREITER MICHAEL | Director | A-Award | A | Restricted Stock Units | 8,299 | 0.00 | — | 8,299 | — | ↗ |
| 2024-03-06 | Averick Robert M | Director / 10% Owner | A-Award | A | Restricted Stock Units | 8,299 | 0.00 | — | 8,299 | — | ↗ |
| 2024-03-01 | LUDWIG MICHAEL M | Director | M-Exempt | D | Restricted Stock Units | 4,189 | 0.00 | — | 0 | — | ↗ |
| 2024-03-01 | GARNREITER MICHAEL | Director | M-Exempt | A | Amtech Systems, Inc. $0.01 par value common stock | 4,189 | 0.00 | — | 22,189 | — | ↗ |
| 2024-03-01 | DAIGLE ROBERT C | Director / Officer | M-Exempt | D | Restricted Stock Units | 7,854 | 0.00 | — | 0 | — | ↗ |
| 2024-03-01 | Averick Robert M | Director / 10% Owner | M-Exempt | D | Restricted Stock Units | 4,189 | 0.00 | — | 0 | — | ↗ |
| 2024-02-29 | DAIGLE ROBERT C | Director / Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 400,000 | 6.00 | 2.40M | 400,000 | — | ↗ |
| 2024-02-13 | DAIGLE ROBERT C | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 3,500 | 4.21 | 14.7K | 103,702 | — | ↗ |
| 2024-02-13 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 20,500 | 4.21 | 86.3K | 414,000 | — | ↗ |
| 2023-12-19 | DAIGLE ROBERT C | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 20,000 | 3.90 | 78.0K | 100,202 | — | ↗ |
| 2023-12-18 | DAIGLE ROBERT C | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 46,000 | 3.96 | 182.2K | 80,202 | — | ↗ |
| 2023-12-18 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 14,000 | 3.90 | 54.6K | 393,500 | — | ↗ |
| 2023-08-25 | DAIGLE ROBERT C | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 4,000 | 8.60 | 34.4K | 34,202 | — | ↗ |
| 2023-08-24 | DAIGLE ROBERT C | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 8,250 | 8.59 | 70.9K | 30,202 | — | ↗ |
| 2023-08-18 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 9,000 | 8.96 | 80.6K | 11,000 | — | ↗ |
| 2023-08-17 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 6,500 | 8.70 | 56.6K | 379,500 | — | ↗ |
| 2023-08-16 | DAIGLE ROBERT C | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 1,200 | 8.75 | 10.5K | 21,903 | — | ↗ |
| 2023-08-15 | DAIGLE ROBERT C | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 233 | 8.75 | 2.0K | 19,703 | — | ↗ |
| 2023-08-14 | DAIGLE ROBERT C | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 1,000 | 9.10 | 9.1K | 19,470 | — | ↗ |
| 2023-08-11 | DAIGLE ROBERT C | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 15,386 | 8.93 | 137.4K | 18,470 | — | ↗ |
| 2023-08-11 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 7,500 | 8.88 | 66.6K | 373,000 | — | ↗ |
| 2023-07-06 | GARNREITER MICHAEL | Director | M-Exempt | A | Amtech Systems, Inc. $0.01 par value common stock | 6,000 | 7.01 | 42.1K | 18,000 | — | ↗ |
| 2023-05-23 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 1,500 | 8.89 | 13.3K | 365,500 | — | ↗ |
| 2023-05-19 | DAIGLE ROBERT C | Director | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 84 | 8.75 | 735.00 | 3,084 | — | ↗ |
| 2023-05-17 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 1,020 | 8.65 | 8.8K | 364,000 | — | ↗ |
| 2023-05-16 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 1,480 | 8.65 | 12.8K | 362,980 | — | ↗ |
| 2023-05-12 | DAIGLE ROBERT C | Director | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 3,000 | 8.75 | 26.3K | 3,000 | — | ↗ |
| 2023-05-12 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 4,750 | 8.95 | 42.5K | 361,500 | — | ↗ |
| 2023-03-13 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 2,250 | 8.96 | 20.2K | 356,750 | — | ↗ |
| 2023-03-10 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 1,000 | 8.95 | 9.0K | 2,000 | — | ↗ |
| 2023-03-01 | LUDWIG MICHAEL M | Director | A-Award | A | Restricted Stock Units | 4,189 | 0.00 | — | 4,189 | — | ↗ |
| 2023-03-01 | GARNREITER MICHAEL | Director | A-Award | A | Restricted Stock Units | 4,189 | 0.00 | — | 4,189 | — | ↗ |
| 2023-03-01 | DAIGLE ROBERT C | Director | A-Award | A | Restricted Stock Units | 7,854 | 0.00 | — | 7,854 | — | ↗ |
| 2023-03-01 | Averick Robert M | Director / 10% Owner | A-Award | A | Restricted Stock Units | 4,189 | 0.00 | — | 4,189 | — | ↗ |
| 2023-02-10 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 4,500 | 9.05 | 40.7K | 354,500 | — | ↗ |
| 2023-01-13 | LUDWIG MICHAEL M | — | — | — | — | — | — | — | 0 | — | ↗ |
| 2022-12-01 | WHANG MICHAEL | Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 12,000 | 0.00 | — | 12,000 | — | ↗ |
| 2022-12-01 | GIBBS LISA | Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 10,000 | 0.00 | — | 10,000 | — | ↗ |
| 2022-11-28 | WHANG MICHAEL | Officer | A-Award | A | Amtech Systems, Inc. $0.01 par value common stock | 12,003 | 0.00 | — | 31,499 | — | ↗ |
| 2022-11-28 | GIBBS LISA | Officer | A-Award | A | Amtech Systems, Inc. $0.01 par value common stock | 8,502 | 0.00 | — | 10,502 | — | ↗ |
| 2022-10-13 | GARNREITER MICHAEL | Director | M-Exempt | A | Amtech Systems, Inc. $0.01 par value common stock | 6,000 | 2.95 | 17.7K | 12,000 | — | ↗ |
| 2022-09-01 | Averick Robert M | Director | P-Purchase | A | Common Stock | 399 | 10.56 | 4.2K | 345,390 | — | ↗ |
| 2022-08-24 | WHANG MICHAEL | Director / Officer | S-Sale | D | Amtech Systems, Inc. $.01 par value common stock | 15,004 | 12.41 | 186.2K | 28,246 | — | ↗ |
| 2022-08-23 | WHANG JONG S | Director | M-Exempt | D | Amtech Systems, Inc. Employee Stock Option | 50,000 | 5.25 | 262.5K | 0 | — | ↗ |
| 2022-05-13 | Averick Robert M | Director | P-Purchase | A | Common Stock | 15,000 | 7.71 | 115.7K | 315,000 | — | ↗ |
| 2022-03-02 | MOHAN SUKESH | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 0.00 | — | 6,000 | — | ↗ |
| 2022-03-02 | GARNREITER MICHAEL | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 0.00 | — | 6,000 | — | ↗ |
| 2022-03-02 | DAIGLE ROBERT C | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 10.22 | 61.3K | 6,000 | — | ↗ |
| 2022-03-02 | Averick Robert M | Director | A-Award | A | Director Stock Option (Right to Buy) | 6,000 | 0.00 | — | 6,000 | — | ↗ |
| 2022-02-23 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 20,000 | 9.68 | 193.6K | 300,000 | — | ↗ |
| 2022-02-22 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 5,000 | 9.80 | 49.0K | 280,000 | — | ↗ |
| 2021-11-23 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 2,500 | 10.30 | 25.8K | 275,000 | — | ↗ |
| 2021-11-22 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 12,500 | 10.66 | 133.3K | 272,500 | — | ↗ |
| 2021-11-16 | WHANG MICHAEL | Director / Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 12,000 | 15.43 | 185.2K | 12,000 | — | ↗ |
| 2021-11-16 | GIBBS LISA | Director / Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 10,000 | 15.43 | 154.3K | 10,000 | — | ↗ |
| 2021-09-08 | WHANG JONG S | Director / Officer | M-Exempt | D | Amtech Systems, Inc. Employee Stock Option | 36,667 | 7.98 | 292.6K | 0 | — | ↗ |
| 2021-09-03 | GARNREITER MICHAEL | Director | M-Exempt | A | Amtech Systems, Inc. $0.01 par value common stock | 6,000 | 7.98 | 47.9K | 6,000 | — | ↗ |
| 2021-08-12 | DAIGLE ROBERT C | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 9.99 | 59.9K | 6,000 | — | ↗ |
| 2021-08-11 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 2,500 | 9.96 | 24.9K | 260,000 | — | ↗ |
| 2021-08-09 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 2,500 | 10.00 | 25.0K | 257,500 | — | ↗ |
| 2021-08-06 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 5,000 | 9.75 | 48.8K | 255,000 | — | ↗ |
| 2021-03-23 | MOHAN SUKESH | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 11.51 | 69.1K | 6,000 | — | ↗ |
| 2021-03-23 | GARNREITER MICHAEL | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 11.51 | 69.1K | 6,000 | — | ↗ |
| 2021-03-23 | Averick Robert M | Director / 10% Owner | A-Award | A | Director Stock Option (Right to Buy) | 6,000 | 11.51 | 69.1K | 6,000 | — | ↗ |
| 2020-12-03 | KING ROBERT F | Director | M-Exempt | D | Amtech Systems, Inc. Non-Employee Director Stock Option | 4,000 | 5.25 | 21.0K | 0 | — | ↗ |
| 2020-11-17 | WHANG MICHAEL | Director / Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 15,000 | 5.67 | 85.1K | 15,000 | — | ↗ |
| 2020-11-17 | WHANG JONG S | Director / Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 15,000 | 5.67 | 85.1K | 15,000 | — | ↗ |
| 2020-11-17 | GIBBS LISA | Director / Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 15,000 | 5.67 | 85.1K | 15,000 | — | ↗ |
| 2020-08-10 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 50,000 | 5.00 | 250.0K | 250,000 | — | ↗ |
| 2020-03-13 | WHANG JONG S | Director / Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 5,115 | 3.90 | 19.9K | 70,681 | — | ↗ |
| 2020-03-10 | WHANG JONG S | Director / Officer | M-Exempt | A | Amtech Systems, Inc. $0.01 par value common stock | 12,500 | 2.95 | 36.9K | 65,566 | — | ↗ |
| 2020-03-04 | MOHAN SUKESH | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 4.90 | 29.4K | 6,000 | — | ↗ |
| 2020-03-04 | KING ROBERT F | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 4.90 | 29.4K | 6,000 | — | ↗ |
| 2020-03-04 | GARNREITER MICHAEL | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 4.90 | 29.4K | 6,000 | — | ↗ |
| 2020-03-04 | Averick Robert M | Director / 10% Owner | A-Award | A | Director Stock Option (Right to Buy) | 6,000 | 4.90 | 29.4K | 6,000 | — | ↗ |
| 2020-03-02 | WHANG MICHAEL | Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 2,000 | 5.00 | 10.0K | 2,000 | — | ↗ |
| 2020-03-02 | GIBBS LISA | Officer | P-Purchase | A | Amtech Systems, Inc. $0.01 par value common stock | 2,000 | 4.95 | 9.9K | 2,000 | — | ↗ |
| 2020-02-25 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 8,500 | 5.11 | 43.4K | 200,000 | — | ↗ |
| 2020-02-11 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 1,565 | 5.29 | 8.3K | 191,500 | — | ↗ |
| 2020-02-10 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 19,935 | 5.56 | 110.8K | 189,935 | — | ↗ |
| 2019-08-30 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 19,341 | 5.28 | 102.1K | 170,000 | — | ↗ |
| 2019-08-28 | Averick Robert M | Director / 10% Owner | P-Purchase | A | Common Stock | 659 | 4.90 | 3.2K | 150,659 | — | ↗ |
| 2019-03-06 | WHANG MICHAEL | Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 10,000 | 4.77 | 47.7K | 10,000 | — | ↗ |
| 2019-03-06 | MOHAN SUKESH | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 4.77 | 28.6K | 6,000 | — | ↗ |
| 2019-03-06 | KING ROBERT F | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 4.77 | 28.6K | 6,000 | — | ↗ |
| 2019-03-06 | GIBBS LISA | Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 10,000 | 4.77 | 47.7K | 10,000 | — | ↗ |
| 2019-03-06 | GARNREITER MICHAEL | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 4.77 | 28.6K | 6,000 | — | ↗ |
| 2019-03-06 | Averick Robert M | Director / 10% Owner | A-Award | A | Director Stock Option (Right to Buy) | 6,000 | 4.77 | 28.6K | 6,000 | — | ↗ |
| 2018-12-06 | HASS ROBERT T | Officer | M-Exempt | A | Common Stock | 3,884 | 3.80 | 14.8K | 5,466 | — | ↗ |
| 2018-11-27 | WHANG MICHAEL | Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 7,500 | 5.52 | 41.4K | 7,500 | — | ↗ |
| 2018-11-27 | WHANG JONG S | Director / Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 25,000 | 5.52 | 138.0K | 25,000 | — | ↗ |
| 2018-11-27 | HASS ROBERT T | Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 17,500 | 5.52 | 96.6K | 17,500 | — | ↗ |
| 2018-11-27 | GIBBS LISA | Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 7,500 | 5.52 | 41.4K | 7,500 | — | ↗ |
| 2018-11-20 | Schreyer Leslie J | 10% Owner | — | — | — | 0 | 0.00 | — | 0 | — | ↗ |
| 2018-11-20 | Cornice Fiduciary Management LLC | 10% Owner | — | D | Common Stock | 0 | 0.00 | — | 1,386,312 | — | ↗ |
| 2018-06-01 | WHANG MICHAEL | Officer | M-Exempt | A | Amtech Systems, Inc. $.01 par value common stock | 5,000 | 7.01 | 35.1K | 5,000 | — | ↗ |
| 2018-06-01 | Pentinga Fokko | Director / Officer | M-Exempt | A | Amtech Systems, Inc. $.01 par value common stock | 16,830 | 3.80 | 64.0K | 31,830 | — | ↗ |
| 2018-05-31 | Pentinga Fokko | Director / Officer | M-Exempt | A | Amtech Systems, Inc. $.01 par value common stock | 1,920 | 3.80 | 7.3K | 16,920 | — | ↗ |
| 2018-05-11 | WHANG MICHAEL | Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 10,000 | 7.40 | 74.0K | 10,000 | — | ↗ |
| 2018-05-11 | MOHAN SUKESH | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 7.40 | 44.4K | 6,000 | — | ↗ |
| 2018-05-11 | KING ROBERT F | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 7.40 | 44.4K | 6,000 | — | ↗ |
| 2018-05-11 | GIBBS LISA | Officer | A-Award | A | Amtech Systems, Inc. Employee Stock Option | 10,000 | 7.40 | 74.0K | 10,000 | — | ↗ |
| 2018-05-11 | GARNREITER MICHAEL | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 7.40 | 44.4K | 6,000 | — | ↗ |
| 2018-05-11 | Averick Robert M | Director / 10% Owner | A-Award | A | Director Stock Option (Right to Buy) | 6,000 | 7.40 | 44.4K | 6,000 | — | ↗ |
| 2018-01-18 | KING ROBERT F | Director | M-Exempt | D | Amtech Systems, Inc. Non-Employee Director Stock Option | 2,000 | 5.75 | 11.5K | 4,000 | — | ↗ |
| 2018-01-04 | WHANG MICHAEL | Officer | — | D | Amtech Systems, Inc. Employee Stock Option | 7,500 | 4.87 | 36.5K | 0 | — | ↗ |
| 2018-01-04 | GIBBS LISA | Officer | — | D | Amtech Systems, Inc. Employee Stock Option | 10,000 | 4.85 | 48.5K | 0 | — | ↗ |
| 2017-12-14 | WANSEM PAUL J VAN DER | Director | G-Gift | D | Common Stock | 6,583 | 0.00 | — | 272,924 | — | ↗ |
| 2017-12-13 | WANSEM PAUL J VAN DER | Director | M-Exempt | D | Stock Options (right to buy) | 8,227 | 6.08 | 50.0K | 0 | — | ↗ |
| 2017-12-13 | GARNREITER MICHAEL | Director | S-Sale | D | Amtech Systems, Inc. $.01 par value common stock | 5,000 | 10.00 | 50.0K | 0 | — | ↗ |
| 2017-11-27 | WHANG JONG S | Director / Officer | S-Sale | D | Amtech Systems, Inc. $.01 par value common stock | 18,600 | 12.54 | 233.2K | 53,066 | — | ↗ |
| 2017-11-24 | WANSEM PAUL J VAN DER | Director | S-Sale | D | Common Stock | 50,662 | 13.04 | 660.6K | 279,537 | — | ↗ |
| 2017-11-22 | WANSEM PAUL J VAN DER | Director | S-Sale | D | Common Stock | 807 | 12.98 | 10.5K | 37,039 | — | ↗ |
| 2017-06-08 | KING ROBERT F | Director | S-Sale | D | Amtech Systems, Inc. $.01 par value common stock | 1,800 | 8.65 | 15.6K | 8,200 | — | ↗ |
| 2017-06-07 | KING ROBERT F | Director | M-Exempt | A | Amtech Systems, Inc. $.01 par value common stock | 2,900 | 7.98 | 23.1K | 12,900 | — | ↗ |
| 2017-03-17 | WANSEM PAUL J VAN DER | Director | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 0 | 5.75 | — | 6,000 | — | ↗ |
| 2017-03-17 | MOHAN SUKESH | Director | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 0 | 5.75 | — | 6,000 | — | ↗ |
| 2017-03-17 | KING ROBERT F | Director | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 0 | 5.75 | — | 6,000 | — | ↗ |
| 2017-03-17 | GARNREITER MICHAEL | Director | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 0 | 5.75 | — | 6,000 | — | ↗ |
| 2017-03-17 | Averick Robert M | Director / 10% Owner | A-Award | A | Director Stock Option (Right to Buy) | 6,000 | 5.76 | 34.5K | 6,000 | — | ↗ |
| 2017-02-15 | WANSEM PAUL J VAN DER | Director | S-Sale | D | Common Stock | 4,937 | 6.23 | 30.8K | 332,356 | — | ↗ |
| 2016-11-10 | HASS ROBERT T | Officer | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 10,000 | 4.71 | 47.1K | 10,000 | — | ↗ |
| 2016-04-01 | HASS ROBERT T | Officer | — | D | Stock Options (right to buy) | 2,667 | 6.15 | 16.4K | 0 | — | ↗ |
| 2016-02-19 | WANSEM PAUL J VAN DER | Director | J-Other | D | Common Stock | 118,476 | 0.00 | — | 0 | — | ↗ |
| 2016-01-15 | Averick Robert M | Director / 10% Owner | A-Award | A | Director Stock Option (Right to Buy) | 6,000 | 5.40 | 32.4K | 6,000 | — | ↗ |
| 2015-11-17 | WHANG JONG S | Director / Officer | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 50,000 | 5.25 | 262.5K | 50,000 | — | ↗ |
| 2015-11-17 | WANSEM PAUL J VAN DER | Director / Officer | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 6,000 | 5.25 | 31.5K | 6,000 | — | ↗ |
| 2015-11-17 | Pentinga Fokko | Director / Officer | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 50,000 | 5.25 | 262.5K | 50,000 | — | ↗ |
| 2015-11-17 | MOHAN SUKESH | Director | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 6,000 | 5.25 | 31.5K | 6,000 | — | ↗ |
| 2015-11-17 | KING ROBERT F | Director | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 6,000 | 5.25 | 31.5K | 6,000 | — | ↗ |
| 2015-11-17 | Goudena Egbert J. G. | Director | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 6,000 | 5.25 | 31.5K | 6,000 | — | ↗ |
| 2015-11-17 | GARNREITER MICHAEL | Director | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 6,000 | 5.25 | 31.5K | 6,000 | — | ↗ |
| 2015-11-17 | Anderson Bradley Clark | Officer | A-Award | A | Amtech Systems, Inc. $.01 par value common stock | 35,000 | 5.25 | 183.8K | 35,000 | — | ↗ |
| 2015-11-02 | PITON CAPITAL PARTNERS LLC | 10% Owner | P-Purchase | A | Common Stock | 100,000 | 5.15 | 515.0K | 600,000 | — | ↗ |
| 2015-10-20 | PITON CAPITAL PARTNERS LLC | 10% Owner | P-Purchase | A | Common Stock | 23,000 | 5.33 | 122.5K | 500,000 | — | ↗ |
| 2015-10-19 | PITON CAPITAL PARTNERS LLC | 10% Owner | P-Purchase | A | Common Stock | 5,000 | 5.27 | 26.4K | 477,000 | — | ↗ |
| 2015-10-16 | PITON CAPITAL PARTNERS LLC | 10% Owner | P-Purchase | A | Common Stock | 27,000 | 5.12 | 138.2K | 472,000 | — | ↗ |
| 2015-10-12 | PITON CAPITAL PARTNERS LLC | 10% Owner | P-Purchase | A | Common Stock | 95,000 | 5.00 | 475.0K | 445,000 | — | ↗ |
| 2015-10-08 | PITON CAPITAL PARTNERS LLC | 10% Owner | P-Purchase | A | Common Stock | 210,000 | 4.89 | 1.03M | 350,000 | — | ↗ |
| 2015-09-30 | WANSEM PAUL J VAN DER | Director / Officer | — | — | — | 0 | 0.00 | — | 0 | — | ↗ |
| 2015-09-15 | KING ROBERT F | Director | P-Purchase | A | Amtech Systems, Inc. $.01 par value common stock | 2,000 | 4.87 | 9.7K | 10,000 | — | ↗ |
| 2015-08-27 | OIH LLC | 10% Owner | — | D | Common Stock | 0 | 0.00 | — | 22,917 | — | ↗ |
| 2015-08-24 | PITON CAPITAL PARTNERS LLC | 10% Owner | P-Purchase | A | Common Stock | 15,000 | 5.11 | 76.6K | 140,000 | — | ↗ |
| 2015-06-24 | PITON CAPITAL PARTNERS LLC | 10% Owner | P-Purchase | A | Common Stock | 25,000 | 10.25 | 256.2K | 125,000 | — | ↗ |
| 2015-06-17 | PITON CAPITAL PARTNERS LLC | 10% Owner | P-Purchase | A | Common Stock | 25,000 | 10.64 | 266.0K | 100,000 | — | ↗ |
| 2015-06-16 | PITON CAPITAL PARTNERS LLC | 10% Owner | P-Purchase | A | Common Stock | 25,000 | 10.70 | 267.5K | 75,000 | — | ↗ |
| 2015-06-03 | PITON CAPITAL PARTNERS LLC | 10% Owner | — | D | Common Stock | 0 | 0.00 | — | 50,000 | — | ↗ |
| 2015-05-26 | WHANG JONG S | Director / Officer | M-Exempt | A | Amtech Systems, Inc. Employee Stock Option | 6,250 | 2.95 | 18.4K | 12,500 | — | ↗ |
| 2015-05-22 | Pentinga Fokko | Director / Officer | M-Exempt | D | Amtech Systems, Inc. Employee Stock Option | 16,250 | 2.95 | 47.9K | 0 | — | ↗ |
| 2015-05-22 | Anderson Bradley Clark | Officer | M-Exempt | A | Amtech Systems, Inc. $.01 par value common stock | 5,002 | 2.95 | 14.8K | 45,059 | — | ↗ |
| 2015-05-20 | WHANG JONG S | Director / Officer | S-Sale | D | Amtech Systems, Inc. $.01 par value common stock | 65,613 | 11.15 | 731.8K | 41,666 | — | ↗ |
| 2015-05-19 | Schreyer Leslie J | 10% Owner | P-Purchase | A | Common Stock | 50,000 | 11.00 | 550.0K | 1,386,312 | — | ↗ |
| 2015-05-12 | M3C Holdings LLC | 10% Owner | P-Purchase | A | Common Stock | 17,500 | 10.81 | 189.2K | 263,688 | — | ↗ |
| 2015-05-11 | M3C Holdings LLC | 10% Owner | P-Purchase | A | Common Stock | 7,500 | 10.72 | 80.4K | 246,188 | — | ↗ |
| 2015-04-17 | Schreyer Leslie J | 10% Owner | P-Purchase | A | Common Stock | 25,000 | 11.09 | 277.2K | 1,336,312 | — | ↗ |
| 2015-04-09 | MOHAN SUKESH | Director | A-Award | A | Amtech Systems, Inc. Non-Employee Director Stock Option | 6,000 | 10.71 | 64.3K | 6,000 | — | ↗ |
| 2015-03-30 | Schreyer Leslie J | 10% Owner | P-Purchase | A | Common Stock | 50,000 | 11.00 | 550.0K | 1,311,312 | — | ↗ |
Executive team
Executive compensation
| # | Year | Executive | Salary | Bonus | Stock award | Option award | Incentive | Other | Total | % Stock- based |
Filing |
|---|---|---|---|---|---|---|---|---|---|---|---|
| 1 | 2025 | Robert C. Daigle Chief Executive Officer, President and Chairman of the Board | 450.0K | — | — | 259.4K | — | 14.2K | 723.6K | 35.85% | ↗ |
| 2 | 2025 | Wade M. Jenke Vice President, Chief Financial Officer | 292.6K | — | 124.8K | — | — | 11.2K | 428.5K | 29.11% | ↗ |
| 3 | 2024 | Robert C. Daigle Chief Executive Officer, President and Chairman of the Board | 450.0K | — | — | 946.0K | — | 15.3K | 1.41M | 67.03% | ↗ |
| 4 | 2024 | Lisa D. Gibbs Former Vice President, Chief Financial Officer and Director | 246.9K | 150.0K | — | 77.7K | — | 14.9K | 489.5K | 15.88% | ↗ |
| 5 | 2024 | Wade M. Jenke Vice President, Chief Financial Officer | 32.3K | — | — | 87.9K | — | 750.00 | 121.0K | 72.67% | ↗ |
| 6 | 2023 | Robert C. Daigle Chief Executive Officer, President and Director | 50.2K | — | 500.0K | 712.8K | — | 458.00 | 1.26M | 95.99% | ↗ |
| 7 | 2023 | Robert C. Daigle Chief Executive Officer, President and Chairman of the Board | 50.2K | — | 500.0K | 712.8K | — | 458.00 | 1.26M | 95.99% | ↗ |
| 8 | 2023 | Michael Whang Former Chief Executive Officer, President and Director | 337.5K | — | — | 137.5K | — | 10.5K | 485.4K | 28.32% | ↗ |
| 9 | 2023 | Lisa D. Gibbs Former Vice President, Chief Financial Officer and Director | 260.0K | — | — | 48.1K | — | 10.0K | 318.1K | 15.12% | ↗ |
| 10 | 2023 | Lisa D. Gibbs Vice President, Chief Financial Officer and Director | 260.0K | — | — | 48.1K | — | 10.0K | 318.1K | 15.12% | ↗ |
| 11 | 2022 | Michael Whang Former Chief Executive Officer, President and Director | 350.0K | — | — | 91.8K | 326.8K | 12.5K | 781.1K | 11.76% | ↗ |
| 12 | 2022 | Michael Whang President, Chief Executive Officer and Director | 350.0K | — | — | 91.8K | 326.8K | 12.5K | 781.1K | 11.76% | ↗ |
| 13 | 2022 | Lisa D. Gibbs Vice President, Chief Financial Officer and Director | 260.0K | — | — | 76.5K | 231.5K | 10.3K | 578.2K | 13.23% | ↗ |
| 14 | 2021 | Michael Whang President, Chief Executive Officer and Director | 330.1K | 35.0K | — | 45.0K | — | 12.9K | 423.0K | 10.65% | ↗ |
| 15 | 2021 | Lisa D. Gibbs Vice President, Chief Financial Officer and Director | 250.0K | 25.0K | — | 45.0K | — | 9.8K | 329.9K | 13.66% | ↗ |
| 16 | 2021 | Jong S. Whang Chairman and Former Chief Executive Officer | 163.5K | — | — | 45.0K | — | 17.0K | 225.5K | 19.98% | ↗ |
| 17 | 2020 | Jong S. Whang Chairman and Former Chief Executive Officer | 221.2K | — | — | — | — | 307.1K | 528.2K | 0.00% | ↗ |
| 18 | 2020 | Michael Whang President, Chief Executive Officer and Director | 260.8K | 40.0K | — | — | — | 40.7K | 341.4K | 0.00% | ↗ |
| 19 | 2020 | Lisa D. Gibbs Vice President, Chief Financial Officer and Director | 225.0K | 30.0K | — | — | — | 15.2K | 270.2K | 0.00% | ↗ |
| 20 | 2020 | Robert T. Hass Former Executive Vice President and Chief Financial Officer | 83.8K | 54.0K | — | 47.3K | — | 3.5K | 188.5K | 25.07% | ↗ |
| 21 | 2019 | Fokko Pentinga former Chief Executive Officer and Director | 217.7K | — | — | 108.2K | — | 1.05M | 1.38M | 7.86% | ↗ |
| 22 | 2019 | Jong S. Whang Executive Chairman, Director and Chief Executive Officer | 200.0K | 25.0K | — | 79.6K | — | 40.0K | 344.6K | 23.11% | ↗ |
| 23 | 2019 | Jong S. Whang Chairman and Former Chief Executive Officer | 200.0K | 25.0K | — | 79.6K | — | 40.0K | 344.6K | 23.11% | ↗ |
| 24 | 2019 | Michael Whang President, Chief Executive Officer and Director | 182.0K | 26.0K | — | 68.7K | — | 7.9K | 284.7K | 24.14% | ↗ |
| 25 | 2019 | Michael Whang Vice President and Chief Operating Officer | 182.0K | 26.0K | — | 68.7K | — | 7.9K | 284.7K | 24.14% | ↗ |
| 26 | 2019 | Robert T. Hass Executive Vice President and former Chief Financial Officer | 199.0K | 17.0K | — | 55.7K | — | 10.6K | 282.3K | 19.74% | ↗ |
| 27 | 2019 | Robert T. Hass Former Executive Vice President and Chief Financial Officer | 199.0K | 17.0K | — | 55.7K | — | 10.6K | 282.3K | 19.74% | ↗ |
| 28 | 2019 | Lisa D. Gibbs Vice President and Chief Financial Officer | 175.0K | 26.0K | — | 68.7K | — | 8.2K | 277.9K | 24.73% | ↗ |
| 29 | 2019 | Lisa D. Gibbs Vice President, Chief Financial Officer and Director | 175.0K | 26.0K | — | 68.7K | — | 8.2K | 277.9K | 24.73% | ↗ |
| 30 | 2018 | Fokko Pentinga former Chief Executive Officer and Director | 340.4K | — | — | — | 122.1K | 53.3K | 515.8K | 0.00% | ↗ |
| 31 | 2018 | Jong S. Whang Executive Chairman, Director and Chief Executive Officer | 200.0K | — | — | — | 80.0K | 46.0K | 326.0K | 0.00% | ↗ |
| 32 | 2018 | Jong S. Whang Chairman and Former Chief Executive Officer | 200.0K | — | — | — | 80.0K | 46.0K | 326.0K | 0.00% | ↗ |
| 33 | 2018 | Jong S. Whang, Executive Chairman, Director and Chief Executive Officer | 200.0K | — | — | — | 80.0K | 46.0K | 326.0K | 0.00% | ↗ |
| 34 | 2018 | Robert T. Hass Executive Vice President and former Chief Financial Officer | 201.6K | — | — | — | 61.9K | 10.4K | 273.9K | 0.00% | ↗ |
| 35 | 2018 | Robert T. Hass Chief Financial Officer | 201.6K | — | — | — | 61.9K | 10.4K | 273.9K | 0.00% | ↗ |
| 36 | 2018 | Robert T. Hass Former Executive Vice President and Chief Financial Officer | 201.6K | — | — | — | 61.9K | 10.4K | 273.9K | 0.00% | ↗ |
| 37 | 2017 | Fokko Pentinga Chief Executive Officer and Director | 324.7K | — | — | — | 260.0K | 58.6K | 643.3K | 0.00% | ↗ |
| 38 | 2017 | Fokko Pentinga former Chief Executive Officer and Director | 324.7K | — | — | — | 260.0K | 58.6K | 643.3K | 0.00% | ↗ |
| 39 | 2017 | Jong S. Whang Executive Chairman and Director | 200.0K | 54.4K | — | — | 205.6K | 37.6K | 497.6K | 0.00% | ↗ |
| 40 | 2017 | Jong S. Whang, Executive Chairman, Director and Chief Executive Officer | 200.0K | 54.4K | — | — | 205.6K | 37.6K | 497.6K | 0.00% | ↗ |
| 41 | 2017 | Jong S. Whang Executive Chairman, Director and Chief Executive Officer | 200.0K | 54.4K | — | — | 205.6K | 37.6K | 497.6K | 0.00% | ↗ |
| 42 | 2017 | Robert T. Hass Chief Financial Officer | 231.5K | — | — | 27.1K | 159.0K | 8.3K | 425.8K | 6.36% | ↗ |
| 43 | 2017 | Robert T. Hass Executive Vice President and former Chief Financial Officer | 231.5K | — | — | 27.1K | 159.0K | 8.3K | 425.8K | 6.36% | ↗ |
| 44 | 2016 | Fokko Pentinga Chief Executive Officer and Director | 379.6K | — | — | 151.7K | — | 49.7K | 581.0K | 26.11% | ↗ |
| 45 | 2016 | Fokko Pentinga former Chief Executive Officer and Director | 379.6K | — | — | 151.7K | — | 49.7K | 581.0K | 26.11% | ↗ |
| 46 | 2016 | Jong S. Whang Executive Chairman and Director | 268.5K | — | — | 151.7K | — | 35.2K | 455.4K | 33.32% | ↗ |
| 47 | 2016 | Jong S. Whang, Executive Chairman, Director and Chief Executive Officer | 268.5K | — | — | 151.7K | — | 35.2K | 455.4K | 33.32% | ↗ |
| 48 | 2016 | Bradley C. Anderson Advisor; Former Chief Financial Officer | 246.2K | — | — | 106.2K | — | 36.3K | 388.7K | 27.32% | ↗ |
| 49 | 2016 | Robert T. Hass Chief Financial Officer | 167.2K | — | — | 15.2K | — | 6.7K | 189.1K | 8.02% | ↗ |
| 50 | 2015 | Jong S. Whang Executive Chairman and Director | 362.8K | 50.0K | — | 304.5K | — | 30.2K | 747.4K | 40.74% | ↗ |
| 51 | 2015 | Fokko Pentinga Chief Executive Officer and Director | 342.1K | 50.0K | — | 304.5K | — | 47.7K | 744.3K | 40.91% | ↗ |
| 52 | 2015 | Bradley C. Anderson Advisor; Former Chief Financial Officer | 258.5K | 50.0K | — | 213.1K | — | 12.5K | 534.1K | 39.91% | ↗ |
| 53 | 2015 | Bradley C. Anderson Chief Financial Officer | 258.5K | 50.0K | — | 213.1K | — | 12.5K | 534.1K | 39.91% | ↗ |
| 54 | 2014 | Fokko Pentinga Chief Executive Officer and Director | 258.1K | — | — | 219.0K | — | 72.5K | 549.6K | 39.85% | ↗ |
| 55 | 2014 | Fokko Pentinga Chief Executive Officer and Director | 258.1K | — | — | 219.0K | — | 72.5K | 549.6K | 39.85% | ↗ |
| 56 | 2014 | Jong S. Whang Executive Chairman and Director | 224.0K | — | — | 219.0K | — | 14.6K | 457.6K | 47.85% | ↗ |
| 57 | 2014 | Jong S. Whang Executive Chairman and Director | 224.0K | — | — | 219.0K | — | 14.6K | 457.6K | 47.85% | ↗ |
| 58 | 2014 | Bradley C. Anderson Chief Financial Officer | 180.2K | — | — | 155.1K | — | 6.6K | 341.9K | 45.36% | ↗ |
| 59 | 2014 | Bradley C. Anderson Advisor; Former Chief Financial Officer | 180.2K | — | — | 155.1K | — | 6.6K | 341.9K | 45.36% | ↗ |
| 60 | 2014 | Bradley C. Anderson Chief Financial Officer | 180.2K | — | — | 155.1K | — | 6.6K | 341.9K | 45.36% | ↗ |
| 61 | 2013 | Fokko Pentinga Chief Executive Officer and Director | 300.7K | — | — | 91.2K | — | 61.3K | 453.2K | 20.12% | ↗ |
| 62 | 2013 | Fokko Pentinga Chief Executive Officer and Director | 300.7K | — | — | 91.2K | — | 61.3K | 453.2K | 20.12% | ↗ |
| 63 | 2013 | Jong S. Whang Executive Chairman and Director | 299.7K | — | — | 91.2K | — | 28.8K | 419.6K | 21.73% | ↗ |
| 64 | 2013 | Jong S. Whang Executive Chairman and Director | 299.7K | — | — | 91.2K | — | 28.8K | 419.6K | 21.73% | ↗ |
| 65 | 2013 | Bradley C. Anderson Chief Financial Officer | 215.7K | — | — | 73.0K | — | 14.4K | 303.1K | 24.07% | ↗ |
| 66 | 2013 | Bradley C. Anderson Chief Financial Officer | 215.7K | — | — | 73.0K | — | 14.4K | 303.1K | 24.07% | ↗ |
| 67 | 2013 | Jeong Mo Hwang Chief Technology Officer | 138.6K | — | — | 27.4K | — | 11.0K | 176.9K | 15.46% | ↗ |
| 68 | 2013 | Robert T. Hass Chief Accounting Officer | 138.6K | — | — | 22.8K | — | 10.3K | 171.7K | 13.28% | ↗ |
| 69 | 2012 | Fokko Pentinga Chief Executive Officer and Director | 340.6K | — | 119.7K | 420.7K | — | 80.2K | 961.3K | 56.22% | ↗ |
| 70 | 2012 | Jong S. Whang Executive Chairman and Director | 383.1K | — | 146.3K | 181.5K | — | 36.2K | 747.0K | 43.88% | ↗ |
| 71 | 2012 | Bradley C. Anderson Chief Financial Officer | 257.3K | — | 66.5K | 82.5K | — | 18.1K | 424.3K | 35.11% | ↗ |
| 72 | 2012 | Jeong Mo Hwang Chief Technology | 166.4K | — | 20.0K | 24.7K | — | 18.9K | 230.0K | 19.43% | ↗ |
| 73 | 2012 | Jeong Mo Hwang Chief Technology Officer | 166.4K | — | 20.0K | 24.7K | — | 18.9K | 230.0K | 19.43% | ↗ |
| 74 | 2012 | Robert T. Hass Chief Accounting Officer | 166.4K | — | 20.0K | 24.7K | — | 14.3K | 225.4K | 19.83% | ↗ |
| 75 | 2011 | Jong S. Whang, Chief Executive Officer and Director | 386.5K | — | 230.4K | 287.1K | 409.6K | 36.2K | 1.35M | 38.33% | ↗ |
| 76 | 2011 | Jong S. Whang Executive Chairman and Director | 386.5K | — | 230.4K | 287.1K | 409.6K | 36.2K | 1.35M | 38.34% | ↗ |
| 77 | 2011 | Fokko Pentinga Chief Executive Officer and Director | 310.0K | 100.0K | 201.6K | 251.2K | 257.9K | 75.9K | 1.20M | 37.84% | ↗ |
| 78 | 2011 | Fokko Pentinga President | 310.0K | 100.0K | 201.6K | 251.2K | 257.9K | 42.8K | 1.16M | 38.92% | ↗ |
| 79 | 2011 | Bradley C. Anderson, Chief Financial Officer | 260.3K | — | 100.8K | 125.6K | 186.6K | 17.4K | 691.1K | 32.76% | ↗ |
| 80 | 2011 | Bradley C. Anderson Chief Financial Officer | 260.3K | — | 100.8K | 125.6K | 186.6K | 17.4K | 690.6K | 32.78% | ↗ |
| 81 | 2011 | Robert T. Hass, Chief Accounting Officer | 165.5K | — | 11.5K | 14.4K | 65.3K | 13.9K | 270.9K | 9.55% | ↗ |
| 82 | 2011 | Robert T. Hass Chief Accounting Officer | 165.5K | — | 11.5K | 14.4K | 65.3K | 13.9K | 270.5K | 9.57% | ↗ |
| 83 | 2011 | Jeong Mo Hwang Chief Technology Officer | 69.4K | — | — | 53.8K | 29.9K | 2.7K | 156.2K | 34.46% | ↗ |
| 84 | 2011 | Jeong Mo Hwang Chief Technology Officer | 69.4K | — | — | 53.8K | 29.9K | 2.7K | 155.8K | 34.56% | ↗ |
| 85 | 2011 | Jeong Mo Hwang Chief Technology | 69.4K | — | — | 53.8K | 29.9K | 2.7K | 155.8K | 34.56% | ↗ |
| 86 | 2010 | Jong S. Whang, Chief Executive Officer and Director | 339.2K | 105.0K | 114.7K | 142.9K | 315.0K | 33.2K | 1.05M | 24.53% | ↗ |
| 87 | 2010 | Jong S. Whang Executive Chairman and Director | 339.2K | 105.0K | 114.7K | 142.9K | 315.0K | 33.2K | 1.05M | 24.53% | ↗ |
| 88 | 2010 | Fokko Pentinga Chief Executive Officer and Director | 247.5K | 170.5K | 66.2K | 82.4K | 211.6K | 47.3K | 825.5K | 18.01% | ↗ |
| 89 | 2010 | Fokko Pentinga President | 247.5K | 170.5K | 66.2K | — | 211.6K | 24.0K | 802.3K | 8.25% | ↗ |
| 90 | 2010 | Fokko Pentinga President | 247.5K | 170.5K | 66.2K | 82.4K | 211.6K | 24.0K | 802.3K | 18.53% | ↗ |
| 91 | 2010 | Bradley C. Anderson Chief Financial Officer | 237.5K | 56.3K | 57.4K | 71.4K | 183.8K | 18.3K | 624.6K | 20.62% | ↗ |
| 92 | 2010 | Bradley C. Anderson, Chief Financial Officer | 237.5K | 56.3K | 57.4K | 71.4K | 183.8K | 18.3K | 624.6K | 20.62% | ↗ |
| 93 | 2010 | Robert T. Hass, Chief Accounting Officer | 131.7K | 18.5K | 15.3K | 19.0K | 55.5K | 10.8K | 250.8K | 13.69% | ↗ |
| 94 | 2010 | Robert T. Hass Chief Accounting Officer | 131.7K | 18.5K | 15.3K | 19.0K | 55.5K | 10.8K | 250.8K | 13.69% | ↗ |
| 95 | 2009 | Jong S. Whang, Chief Executive Officer and Director | 315.5K | 95.0K | 190.0K | — | — | 23.5K | 761.5K | 24.95% | ↗ |
| 96 | 2009 | Bradley C. Anderson, Chief Financial Officer | 222.2K | 50.0K | 38.0K | — | — | 10.8K | 389.7K | 9.75% | ↗ |
| 97 | 2009 | Robert T. Hass, Chief Accounting Officer | 138.7K | 12.0K | 30.4K | — | — | 7.0K | 208.7K | 14.56% | ↗ |
| 98 | 2008 | Jong S. Whang, Chief Executive Officer and Director | 272.8K | — | 147.9K | — | 200.0K | 20.4K | 902.1K | 16.39% | ↗ |
| 99 | 2008 | Bradley C. Anderson, Chief Financial Officer | 196.4K | — | 74.0K | — | 107.3K | 10.4K | 518.6K | 14.26% | ↗ |
| 100 | 2008 | Robert T. Hass, Chief Accounting Officer | 135.9K | — | 22.2K | — | 37.4K | 7.8K | 246.8K | 8.99% | ↗ |
| 101 | 2007 | Jong S. Whang, Chief Executive Officer and Director | 240.4K | — | — | — | 115.2K | 12.5K | 396.3K | 0.00% | ↗ |
| 102 | 2007 | Bradley C. Anderson, Chief Financial Officer | 176.2K | — | — | — | 69.1K | 9.8K | 293.2K | 0.00% | ↗ |
| 103 | 2007 | Robert T. Hass, Chief Accounting Officer | 120.0K | — | — | — | 23.1K | 5.4K | 155.4K | 0.00% | ↗ |
| 104 | 2006 | Jong S. Whang President and Chief Executive Officer | 175.4K | 100.0K | — | — | — | — | 275.4K | 0.00% | ↗ |
| 105 | 2006 | Robert T. Hass Chief Accounting Officer | 116.9K | — | — | — | — | — | 116.9K | 0.00% | ↗ |
| 106 | 2006 | Bradley C. Anderson, Chief Financial Officer | 75.0K | 16.0K | — | — | — | — | 91.0K | 0.00% | ↗ |
| 107 | 2005 | Jong S. Whang President and Chief Executive Officer | 150.7K | 18.6K | — | — | — | — | 169.3K | 0.00% | ↗ |
| 108 | 2005 | Jong S. Whang President and Chief Executive Officer Vice President — Finance | 150.7K | 18.6K | — | — | — | — | 169.3K | 0.00% | ↗ |
| 109 | 2005 | Robert T. Hass Chief Accounting Officer | 102.0K | — | — | — | — | — | 102.0K | 0.00% | ↗ |
| 110 | 2004 | Robert T. Hass Chief Accounting Officer | 102.0K | 57.5K | — | — | — | — | 159.5K | 0.00% | ↗ |
| 111 | 2004 | Robert T. Hass Vice President – Finance | 102.0K | 57.5K | — | — | — | — | 159.5K | 0.00% | ↗ |
| 112 | 2004 | Jong S. Whang President and Chief Executive Officer | 150.7K | — | — | — | — | — | 150.7K | 0.00% | ↗ |
| 113 | 2004 | Jong S. Whang President and Chief Executive Officer Vice President — Finance | 150.7K | — | — | — | — | — | 150.7K | 0.00% | ↗ |
| 114 | 2004 | Jong S. Whang President and Chief Executive Officer | 150.7K | — | — | — | — | — | 150.7K | 0.00% | ↗ |
| 115 | 2003 | Jong S. Whang President and Chief Executive Officer Vice President — Finance | 150.7K | — | — | — | — | — | 150.7K | 0.00% | ↗ |
| 116 | 2003 | Jong S. Whang President and Chief Executive Officer | 150.7K | — | — | — | — | — | 150.7K | 0.00% | ↗ |
| 117 | 2003 | Jong S. Whang President and Chief Executive Officer | 150.7K | — | — | — | — | — | 150.7K | 0.00% | ↗ |
| 118 | 2003 | Robert T. Hass Vice President – Finance | 102.0K | — | — | — | — | — | 102.0K | 0.00% | ↗ |
| 119 | 2003 | Robert T. Hass Vice President – Finance | 102.0K | — | — | — | — | — | 102.0K | 0.00% | ↗ |
| 120 | 2002 | Jong S. Whang President and Chief Executive Officer | 150.7K | 3.6K | — | — | — | — | 154.3K | 0.00% | ↗ |
| 121 | 2002 | Jong S. Whang President and Chief Executive Officer | 150.7K | 3.6K | — | — | — | — | 154.3K | 0.00% | ↗ |
| 122 | 2002 | Robert T. Hass Vice President – Finance | 102.0K | 18.0K | — | — | — | — | 120.0K | 0.00% | ↗ |
| 123 | 2002 | Robert T. Hass Vice President – Finance | 102.0K | 18.0K | — | — | — | — | 120.0K | 0.00% | ↗ |
| 124 | 2001 | Jong S. Whang President and Chief Executive Officer | 168.0K | 69.4K | — | — | — | 16.7K | 254.1K | 0.00% | ↗ |
| 125 | 2001 | Robert T. Hass Vice President – Finance | 111.1K | 1.5K | — | — | — | 2.9K | 115.4K | 0.00% | ↗ |
Proxy statements
Recent SEC filings
Executive team
| Name | Title | Compensation | Gender |
|---|---|---|---|
| Robert C. Daigle | President, Chairman & Chief Executive Officer | 464.2K | male |
| Angi Larson | Chief Human Resources Officer | — | female |
| Jason Brown | Vice President & General Manager SFS Division and Global Operations | — | male |
| Mark D. Weaver | Interim CFO and Principal Accounting & Financial Officer | — | male |
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Community Opinion for ASYS
Short-term intention
Target Price Distribution
These are community opinions and do not constitute buy or sell advice to act on. The results shown are based on aggregated opinions and are not an investment recommendation, nor do they intend to influence any investment decision.

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